Semiconductor Ceramics | Plasma-Resistant Alumina & Yttria Parts
Semiconductor Ceramics: Precision Components for Wafer Processing & Etch Equipment
Semiconductor manufacturing tolerates almost no contamination and almost no dimensional drift. A single micron of wear on a wafer chuck, or a chemical reaction between a chamber component and plasma, can scrap an entire production run. That's why fabs specify ceramics — specifically high-purity alumina, yttria-stabilized zirconia, and aluminum nitride — for the parts that sit inside etch chambers, CVD/PVD tooling, and wafer-handling systems.
We machine these components to the tolerances semiconductor equipment OEMs and fabs require, from prototype quantities through production runs.
Where these parts are used ?
Etch chamber liners, rings, and nozzles exposed to fluorine/chlorine-based plasma
Wafer chucks and end-effectors for handling and transport
Insulating standoffs and feedthroughs in high-voltage RF equipment
Susceptors and heater plates for CVD/epitaxial processes
Electrostatic chuck (ESC) components
Why ceramics over metal or PEEK here ?
Metals corrode or sputter under plasma exposure, introducing metal contamination into the chamber. PEEK and other polymers can't survive chamber bake-out temperatures. Semiconductor-grade ceramics solve both problems: they're chemically inert to most process gases, dimensionally stable across repeated thermal cycling, and won't outgas under vacuum.
Materials we work in.
Material | Why it's chosen for semiconductor applications |
High-purity Alumina (Al₂O₃, 99.5%+) | Baseline dielectric insulator, cost-effective, good machinability |
Yttria-Stabilized Zirconia (YSZ) | Superior plasma/etch resistance vs. alumina in fluorine chemistry |
Aluminum Nitride (AlN) | High thermal conductivity — used where heat must be dissipated through the insulator |
Silicon Nitride (Si₃N₄) | High mechanical strength where thermal shock resistance matters |
Specifications
Property | Typical Range |
Purity (Alumina) | 95%–99.7% |
Dimensional tolerance | ±0.01–0.03 mm (confirm your tightest demonstrated tolerance) |
Surface finish | Ra 0.2–0.8 μm (confirm your standard vs. optical-grade finish) |
Max working temperature | Up to 1400°C (confirm per material) |
Dielectric strength | Confirm test standard used (ASTM D149 or equivalent) |
Upload your drawing or spec sheet for a technical review → [Request RFQ] FAQs
1: What are semiconductor ceramics? They are advanced ceramics with excellent electrical insulation and thermal properties used in semiconductor and electronics manufacturing.
Q2: Are these ceramics suitable for high-power applications? Yes, they perform extremely well in high-power, high-temperature conditions.
Q3: Can I order custom sizes? Yes, full customization is available for thickness, shapes, holes, and tolerances.
Q4: What materials do you offer? Alumina, zirconia, silicon nitride, and other advanced ceramic composites.
Product details
Type：Semiconductor Industry
Material：99.5%Alumina Ceramics
Shape：Customized Designs
Surface Roughness：Ra 0.6μm
Torlerance：+-0.01mm
Application Field：Industrial Ceramic
Processing Service：tooling,pressing,sintering,grinding,assembling,QC inspection
