Mark MA

Custom silicon carbide seal rings in sintered SSiC and reaction-bonded RBSiC grades, manufactured to your drawing with US-based engineering, application support, and quality assurance.

Written by: Mark Ma , Lead Materials Engineer · Who this is for: Etch and deposition equipment engineers deciding between bulk yttria, yttria-coated parts, and alumina or quartz for plasma-facing chamber components, and the buyers sourcing them. Yttria ceramic is yttrium oxide (Y₂O₃) formed into dense bulk parts or applied as a coating to chamber components in plasma etch and deposition tools. Engineers specify it because it erodes far more slowly than alumina or quartz in fluorine-based...

Written by: Mark Ma, Lead Materials Engineer · Who this is for: Equipment and process engineers at semiconductor OEMs and fabs choosing a material and design for a wafer transfer robot blade, and the buyers sourcing it. A ceramic end effector is the blade or fork at the end of a wafer handling robot that picks, carries, and places wafers between cassettes, FOUPs, load locks, and process chambers. Engineers specify ceramic instead of aluminum or PEEK when the blade must stay flat, avoid metal...